Rotary stage A-68x

motorizedmulti-axisprecision

• 365 mm diameter motion platform, 260 mm diameter aperture • Eccentricity and flatness < 300 nm The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance. Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Application fields Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 3-Phase torque motor • Brushless • Low cogging torque Accessories and options • Incremental or absolute encoder • PIglide filter and air preparation kit • Single or multi-axis motion controllers and servo drives • Multi-axis/customized setups • Base plates made of granite and systems for reducing vibration