Miniature Multilayer Piezo Actuators
• Superior lifetime
• Ultra-compact: From 2 mm × 2 mm × 2 mm
• Ideal for dynamic operation
• Microsecond response
• Subnanometer resolution
• UHV-compatible to 10-9 hPa
Piezo linear actuator with PICMA® multilayer technology
Operating voltage -20 to 100 V. Ceramic insulation, polymer free. Humidity resistance. UHV-compatible to 10-9 hPa, no outgassing, high bakeout temperature. Flexible thanks to numerous designs. Versions with rectangular, round or annular cross section.
Possible modifications
PTFE-insulated wire leads. Various geometric shapes, inner hole. Precision-ground ceramic end plates.
Fields of application
Industry and research. For laser tuning, microdispensing, life sciences.