Miniature Multilayer Piezo Actuators with and without Inner Hole
• Superior lifetime
• Ultracompact: From 5 mm Ø
• Ideal for dynamic operation
• µs response time
• Subnanometer resolution
• UHV-compatible to 10-9 hPa
Piezo linear actuator with PICMA® multilayer technology
Operating voltage -20 to 100 V. Ceramic insulation, polymer free. Humidity resistance. UHV-compatible to 10-9 hPa, no outgassing, high bakeout temperature. Flexible thanks to numerous designs. Versions with rectangular, round or annular cross section.
Fields of application
Industry and research. For laser tuning, microdispensing, life sciences.
Customized versions and other specifications on request
• PTFE-insulated wire leads
• Variety of shapes
• Inner hole
• Precision-ground ceramic end plates