Multilayer Ring Actuator
With Inner Hole
• Inner hole for preload or as aperture for optical applications
• Superior lifetime
• Ideal for dynamic operation
• Microsecond response
• Subnanometer resolution
• UHV-compatible to 10-9 hPa
Multilayer stack actuators
Flexible travel range up to 30 µm. Round cross section for easy integration.
UHV-compatible to 10-9 hPa, no outgassing, high bakeout temperature.
PICMA® piezo linear actuators
Low operating voltage -20 to 100 V. Ceramic insulation. High reliability, long lifetime.
Possible modifications
Different heights, fast mounting according to customer requirements. Variety of shapes. Precision-ground end plates for reduced tolerances
Fields of application
Industry and research. For laser tuning, microdispensing, life sciences.