All-Ceramic Bending Actuators with High Displacement
• Displacement to 480 µm
• Fast response in the ms range
• Nanometer resolution
• Low operating voltage
• UHV-compatible to 10-9 hPa
PICMA® multilayer bender elements with high reliability
Operating voltage 0 to 60 V. Bidirectional displacement, bimorph design. Ceramic insulation, polymer free. UHV-compatible to 10-9 hPa, no outgassing, high bakeout temperature. Reliable even under extreme conditions.
Fields of application
Industry and research, vacuum. For medical technology, laser technology, sensor technology, automation tasks, pneumatic valves.