Compact Multi-Axis Actuators
• Single and multi-axis versions
• Travel ranges to 10 × 10 × 10 µm
• Extreme reliability: >109 cycles
• Picometer resolution
• Short lead times
Piezo shear actuators
Operating voltage -250 to 250 V. Lateral displacement is based on the piezoelectric shear effect. Excellent dynamics with minimum electric power requirement.
Variants with inner hole or for use in cryogenic and UHV environments to 10-9 hPa.
Fields of application
• Industry and research
• Scanning applications
• Microscopy
• Precision mechanics
• Switching applications
Possible modifications
• Piezo ceramic material
• Nonmagnetic versions
• Operating voltage range, displacement, layer thickness, cross-sectional dimension
• Load capacity, force generation
• Mechanical interfaces: flat, spherical, metal, ceramic, glass, sapphire, etc.
• Extra-tight length tolerances