Compact Actuators for Cryogenic and UHV Environments
• UHV-compatible to 10-9 hPa
• For cryogenic environments
• Extreme reliability: >109 cycles
• Picometer resolution
• µs response time
Piezo shear actuators
Operating voltage -250 to 250 V. Suitable for use in cryogenic and UHV environments to 10-9 hPa. Lateral displacement is based on the piezoelectric shear effect. Excellent dynamics with minimum electric power requirement.
Variants for multi-axis motion, also with inner hole.
Fields of application
• Industry and research
• Low temperature / vacuum environment to 10-9 hPa
• Scanning applications
• Microscopy
• Precision mechanics
• Switching applications
Possible modifications
• Piezo ceramic material
• Nonmagnetic versions
• Operating voltage range, displacement, layer thickness, cross-sectional dimension
• Load capacity, force generation
• Mechanical interfaces: flat, spherical, metal, ceramic, glass, sapphire, etc.
• Extra-tight length tolerances