Sligtly bigger version of the AL18 with more options and load capacity.
Dimensions: -
L: 680mm W: 630mm H: 650mm
Weight: -
110 KG
Volume: -
36 Liter
Process chamber: -
aluminium, L: 350mm W: 320mm H: 320mm
Microwave output: -
2,45 GHz / 50 - 1200 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional): -
aluminium, custom design possible
Vacuum connection: -
DN 25 ISO-KF
Venting: -
electromagnetic solenoid valve
Pump system: -
15-65 m³/h
Chamber door: -
hinged-type with viewing port