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Coating system AL 36

coating system
coating system
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Description

Sligtly bigger version of the AL18 with more options and load capacity. Dimensions: - L: 680mm W: 630mm H: 650mm Weight: - 110 KG Volume: - 36 Liter Process chamber: - aluminium, L: 350mm W: 320mm H: 320mm Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 25 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - 15-65 m³/h Chamber door: - hinged-type with viewing port

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