Ideal for medium sized substrates or PCB plates.
Dimensions: -
L: 1050mm W: 800mm H: 2020mm
Weight: -
95 KG
Volume: -
76/100 Liter
Process chamber: -
aluminium, L: 400mm W: 480mm H: 520mm
Microwave output: -
2,45 GHz / 50 - 1200 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional): -
aluminium, custom design possible
Vacuum connection: -
DN 63 ISO-KF
Venting: -
electromagnetic solenoid valve
Pump system: -
up to 250m³/h (integrated)
Chamber door: -
you can choose between hinged-type with viewing port, drawer door or universal door