The absolute biggest AL-system we have to offer. For the largest substrates and quantities.
Dimensions: -
L: 1200mm W: 900mm H: 1800mm
Weight: -
300 KG
Volume: -
800 Liter
Process chamber: -
L: 900 W: 920 H: 900
Microwave output: -
2,45 GHz / 50 - 1200 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional): -
aluminium, custom design possible
Vacuum connection: -
DN 63 ISO-KF
Venting: -
electromagnetic solenoid valve
Pump system: -
up to 250m³/h
Chamber door: -
you can choose between hinged-type with viewing port, drawer door or universal door