Coating system Q150

Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing. Dimensions: - L: 500mm W: 550mm H: 370mm Weight: - 40 KG Volume: - 4 Liter Process chamber: - Quarzglas, 150mm Ø, B: 244mm Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 25 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - up to 25m³/h Chamber door: - you can choose between hinged-type with viewing port and drawer door with attached support rods Wafer size: - up to 125mm, at a number of 25 wafers