Coating system Q 240S

A system with the diameter of our Q240 but with reduced chamber depth for the sake of saving space. Dimensions: - L: 620mm W: 550mm H: 500mm Weight: - 75 KG Volume: - 9 Liter Process chamber: - Quarzglas, 240mm Ø , B: 244mm Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 40 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - up to 25m³/h Chamber door: - you can choose between hinged-type with viewing port and drawer door with attached support rods Wafer size: - up to 150mm, at a number of 25 wafers