Coating system Q 240

The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter. Dimensions: - L: 760mm W: 775mm H: 775mm Weight: - 100 KG Volume: - 20 Liter Process chamber: - quartz glass, 240mm Ø, B: 450mm Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 40 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - up to 40m³/h Chamber door: - you can choose between hinged-type with viewing port and drawer door with attached support rods Wafer size: - up to 200mm, at a number of 50 wafers