Coating system AL 900

Modified machine. Dimensions: - L: 550mm W: 1900mm H: 900mm Weight: - 180 KG Volume: - 250 Liter Porcess chamber: - aluminum with panel holder: panel holder : L: 400mm B: 650mm H: 800mm circuit boards: up to 4/5 panels mit 18x24" or 20x24" LF-output (Low Frequency): - operating frequency = 40 KHz, up to 2000 Watt Microwave output: - 2,45 GHz / 50 - 1200 Watt Inclusive: - 1 gas channel (gas distribution system inside the process chamber), up to 6 channels available Substrate holder (optional): - aluminium, custom design possible Vacuum connection: - DN 63 ISO-KF Venting: - electromagnetic solenoid valve Pump system: - up to 250m³/h Chamber door: - hinged-type with viewing port