This is the Parylene system. It is a modular system divided into two parts: chamber module and evaporator module.
Dimensions: -
L: 2600mm W: 960 H: 1460mm
Weight: -
~ 450 KG
Volume: -
800 / 1000 litres
Process chamber: -
1150mm Ø H: 600mm (800 Liter), 1000mm Ø H: 1100
Plasma source: -
2,45GHz, 1200 Watt
Inclusive: -
1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
Cooling system: -
8 liter (electromechanical Cool-trap)
Vacuum connection: -
DIN 63 ISO-KF
Venting: -
electromagnetic solenoid valve
Pump system: -
75m³/h
Electrical connection: -
3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW