Vacuum coating application system
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Characteristics
- Options
- vacuum
Description
A robotic-powered, multi-chamber system for the most complex coating processes in a low-pressure environment.
Dimensions: -
L: 2000mm W: 1800mm H: 2000mm
Weight: -
~ 320 KG
Volume: -
50 litres
3 process chambers: -
VA L:300 W:300 H:300
Plasma source: -
2,45 GHz, 1200 Watt / 13,56 MHz, 600 Watt
Inclusive: -
3x3 gas channels (gas distribution system inside the process chamber)
Additionally: -
air lock robot, example substrate holder for air lock
Substrate holder (optional): -
Aluminum, customized design possible
Vacuum connection: -
DN 63 ISO-KF
Venting: -
electromagnetic solenoid valve
3 Pump systems: -
40m³/h
Chamber door: -
Maintenance chamber doors
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