Automatic testing machine MSA-600

opticalMEMSmodular

OPTICAL 3D TEST STATION FOR MEMS AND MICROSTRUCTURES This full optical workstation allows surface topography and dynamic motion analysis for quality control, testing and development of microstructures and MEMS devices (micro-electro-mechanical systems). The 3D visualization and data are key for FEM validation, determination of cross-talk and for surface profiling and form parameter evaluation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography and both in-plane and out-of-plane motion components. MEASUREMENT OF DYNAMIC RESPONSE AND 3D TOPOGRAPHY ON MEMS AND MICROSTRUCTURES The versions MSA-600-M/V cover a frequency range up to 25 MHz, perfectly suited for testing MEMS, MEMS microphones and other microsystems. The higher frequency versions MSA-600-X/U cover a frequency range up to 2.5 GHz, ideal for study of high-frequency HF MEMS resonators, micro-acoustic devices like SAW, BAW and more. HIGHLIGHTS • - All-in-one optical measurement workstation for microstructures • - Real-time response measurement (no post-processing required) • - Versions MSA-600-M/V with up to 25 MHz • - Versions MSA-600-X/U with up to 2.5 GHz • - Unparalleled sub-pm displacement resolution • - Fast measurement and visualization of deflection shapes • - Straightforward and intuitive operation • - Automated system for easy integration into probe stations • - Import / export options for FE model validation Ask for a demo, feasibility study, send your MEMS sample or benefit from remote and on-site support, integration into probe-stations and production lines. Contact us!