Optical microscope MSA-650 IRIS

measuringautomatedreal-time

Optical characterization of dynamics inside Si-capped MEMS Dynamic characterization of MEMS devices to measure and visualize mechanical response is important for product development, trouble shooting and FE model validation. The MSA Micro System Analyzers from Polytec provide fast, accurate optical measurements of out-of-plane (OOP) and in-plane motion (IP). Until now, this has been limited to unpacked devices that are optically accessible. Now, the Polytec MSA-650 IRIS Micro System Analyzer allows even measuring through intact silicon caps on encapsulated microstructures like e.g. inertial sensors, MEMS microphones, pressure sensors and more. IR capability to measure MEMS dynamics through different layers of Si-capped devices Real-time out-of-plane response measurement up to 25 MHz (w/o post-processing) Sub-picometer out-of-plane displacement resolution Straighforward FE model validation of MEMS in final state Superior separation of the individual device layers Stroboscopic video microscope to measure in-plane motion up to 2.5 MHz Automated system that integrates well for production (probe station compatibility)