Gas filter GasPro ™ TEM-2260 series
cartridgeprocessstainless steel

gas filter
gas filter
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Characteristics

Designed for
gas
Filtration element
cartridge
Applications
process
Material
stainless steel, PTFE
Other characteristics
high-flow, in-line
Filtration size

0.003 µm

Description

New Product Launch: GasPro ™ TEM-2260 High Flow PTFE 316L In-Line Filter GasPro ™ TEM-2260 series filters are specifically designed for the filtration of semiconductor gases when ultra-high flow rates are required. This all-welded assembly will deliver 0.003 micron particle retention where a high flow rate is required and space is limited. A PTFE membrane and polypropylene supported cartridge is enclosed in a 316L stainless steel electropolished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. Applications include: • General and process inert facilities gases. • Clean-dry air (CDA*) for critical processes including front opening unified pod (FOUP) cleaning and photolithography. View the datasheet for more information.

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HIGH PURITY FLOW RESTRICTORS AND DIFFUSERS

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.