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Large format positioning stage H116XYmotorized2-axis
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Characteristics
- Orientation
- XY
- Type
- motorized
- Number of axes
- 2-axis
- Other characteristics
- industrial, for microscopes, long-travel, for heavy loads, with built-in stepper motor, large format, ball screw
- Stroke
Max.: 256 mm
(10.079 in)Min.: 215 mm
(8.465 in)- Speed
40 mm/s
- Repeatability
2 µm
- Load
Max.: 25 kg
(55.12 lb)Min.: 0 kg
(0 lb)
Description
The H116/2 stage is designed for scanning semiconductor wafers, photo masks, flat panel displays and printed circuit boards up to 200 mm (8-inch) diameter. It also features 10-inch X-axis travel to facilitate safe sample loading, and is compatible with transmitted light applications. Additionally, the stage supports a 25 kg load capacity making it capable of accurately positioning large and complex industrial samples over this large travel range. Featuring Prior's patented Intelligent Scanning Technology (IST) to optimize stage accuracy, linearity and other performance characteristics, in combination with a 2 mm ballscrew for speed the HE12/2ST is optimized for scanning very large industrial samples reliably and efficiently. Alternative drive configurations for further increased speed may be available depending on your region.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.