The scanner is a combination of optics and motion system. Two pivoting mirrors deflect the laser beam in x- and y-direction. With the small mass and inertia of the moving mirrors, high speeds of several meters per second are possible enabling a quasi-simultaneous process type with multiple contour cylces per second. The final focusing lens (f-theta) determines the size of the working area, which can measure 100 x 100 mm, 240 x 240 mm, or 350 x 350 mm.