Oxygen analyzer EXTREL™ VeraSpec™ APIMS

COCH4water

Our EXTREL™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications. Contamination is costly, and for more than 20 years, APIMS has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes a 19mm, tri-filter quadrupole mass filter in semiconductor gas analysis for the very best performance, reliability, and uptime. Industry-best lower detection limits (LDLs) for bulk gas analysis Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more Well-established, powerful mass spectrometry technology Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration Semiconductor manufacturers need the ability to continuously verify the purity of process gases in real-time and detect trace contamination at concentrations in the low parts-per-trillion (ppt). Monitor a wide range of gases and gas mixtures with the stability that provides the long-term repeatability required in most applications. Ask about our APIMS SX5 with Stream Switcher capabilities.