CO analyzer VeraSpec™ APIMS-SX5

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Semiconductor manufacturers need the ability to continuously verify the purity of process gases in real-time and detect trace contamination at concentrations in the low parts-per-trillion (ppt). Monitor a wide range of gases and gas mixtures with the stability that provides the long-term repeatability required in most applications. Ask about our APIMS SX5 with Stream Switcher capabilities. •Elegant stream switching for monitoring ultra-high purity bulk gases Real-time, multi-species monitoring for ALL Critical Impurities in bulk electronic gases including trace O2, H2, H2O, CH4, CO, CO2, N2, Ar and more • NEW! Optional automated stream switching capability with the SX5 stream switcher gas cabinet. Automatically cycle between up to five bulk gases! • Unparalleled measurement range from PPT to 100%with unique dual-source ionization configuration • Easy to use with integrated User Interface and scheduled automated calibrations • Industry-best customer support and applications team