Gas analyzer TIGER OPTICS™ T-I MAX™

hydrogenchloridemonitoring

NEXT-GENERATION TRACE HYDROGEN CHLORIDE GAS ANALYZER You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our TIGER OPTICS™ T-I Max™ HCl analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays. In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices. With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max HCl analyzers, based on our new global platform, can detect and continuously monitor HCl with an unprecedented combination of sensitivity, selectivity, and speed of response. Our GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points. BENEFITS Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS) Dramatically improved speed of response & parts-per-trillion detection limits Drift-free, with calibration traceable to the world’s leading reference labs Lowest cost of ownership – maintenance-free