The SAM 300 TWIN is a high performance tool enabling non destructive acoustic investigations for high throughput analysis, quality control and research applications. It features a new high speed linear motion scanner and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.
A new master/slave concept enables arrays of two transducers to acquire simultaneous acoustic images.
Built to semiconductor industry standards around a core platform that utilizes the latest production and research technology, the SAM TWIN SCAN can accurately handle wafers up to 300 mm. Ultrasound frequencies range up to 500 MHz with transducers from 10 MHz - 400 MHz.
Scanning range: x=250 µm-320 mm, y=250 µm-320 mm, z=100mm
Auto focus is applied to each transducer