The SAM 400 QUAD is a high performance tool enabling non destructive acoustic investigations for high throughput analysis, quality control and research applications. It features a new high speed linear motion scanner and new rf and transducer technologies of up to 400 MHz, controlled through a user friendly graphical interface.
A new master/slave concept enables arrays of four transducers to acquire simultaneous acoustic images.
Built to semiconductor industry standards around a core platform that utilizes the latest production and research technology, the SAM QUAD SCAN can accurately handle wafers up to 400 mm. Ultrasound frequencies range up to 500 MHz with transducers from 3 MHz - 400 MHz.
Scanning range: x=250 µm-430 mm, y=250 µm-430 mm, z=100mm
Auto focus is applies to each transducer