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Wafer cleaning system waterautomaticfor the semiconductor industry
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Characteristics
- Technology
- water
- Operational mode
- automatic
- Applications
- for the semiconductor industry, for wafers
Description
Clean wafers are the basis for excellent semiconductor products. The fully automated RENA Final Cleaning System provides highest quality surfaces for the last wafering step. Sophisticated processes and advanced scheduling make it the perfect solution for semiconductor wafer production with high throughput and challenging requirements.
Features and benefits
Superior surface cleanliness for wafers up to 300 mm
Fully automated handling carrierless or with LMC carrier
Perfect finishing with RENA Marangoni Dryer
Standard SEMI interfaces for easy fab integration
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.