Applications for wet chemical cleaning and etching processes are performed highly efficiently including rinsing and drying. RENA spray batch system is designed for acids and bases. Up to five processes can be combined in one chamber; this offers great potential for efficiency and process optimization. No direct contact to chemical by operator, this makes the process safe.
Features and Benefits
Reduced medium consumption
Optimized footprint
Single or dual cassette handling
Highly serviceable, easy access
SECS/GEM Interface Options
Flexible and Upgradeable
Improved operator user safety