The RENA’s MultiChem is a local carboy chemical supply system which enables delivery and storage of chemicals for processes with lower chemical demands. MultiChem is suitable for all types of acids, bases and solvents. It provides recapture (reclaim) capabilities through the use of 5-gallon chemical carboys. MultiChem is reliable, field-proven platform conforms to safety and health protocols in SEMI S2 standard and can be seamlessly integrated with wet benches. Through application of RENA’s chemical handling system, customers can scale the chemical delivery according to their process demands.
Features and benefits
2 - 6 tank individual bays for chemical containers available
Chemical containers from 1-gallons bottles to 5-gallons carboys
Liquid-level detection
Minimal footprint
Cabinet provides spill containment
No spill quick disconnects
Easy access to all pumps and valves