The RENA’s FlexChem is a compact pumping unit designed for elimination of manual transport and pouring of chemicals from the containers to process tools. FlexChem is a flexible chemical delivery system, suitable for acids, bases and solvent applications. It can be easily scaled according to customers requirement for future expansions. This platforms conforms to safety and health protocols in SEMI S2 standards.
Features and benefits
Modular, Stackable Configurations
Chemical Room Compatible
Easy to Install and Maintain
Pump Cabinet Design
Minimal Footprint
Internal Spill and Leak Detection
Visual & Audible Alarms
Exhaust Monitoring