Incremental linear encoder TONiC™ UHV RELM20

opticalnon-contactanalog

What is TONiC UHV? TONiC UHV brings Renishaw's super-compact, non-contact encoder system to Ultra-High Vacuum applications offering customers improved motion control. TONiC offers speeds up to 10 m/s and, combined with the Ti interface, resolutions down to 1 nm for both linear and rotary applications. TONiC systems are quick and simple to install with wide set-up tolerances and calibration at the push of a button. TONiC's dynamic signal processing gives improved signal stability with ultra-low Sub-Divisional Error of typically <±30 nm to help realise superior motion control performance. What is RELM20 scale? RELM20 is a spar scale manufactured from ZeroMet™, a low expansion nickel/iron alloy, featuring a 20 µm pitch. It is comparable to fine pitch glass scales and offers a total accuracy (including slope and linearity) better than ±1 µm over a 1.5 m length. ZeroMet has a coefficient of thermal expansion of 0.75 ±0.35 μm/m/°C at 20 °C. System designers can choose between specially formulated UHV compatible adhesive tape or mechanical clips to suit mounting requirements. Both mounting methods allow for independent thermal expansion to that of the substrate.