Throughput: 5000-12000 wafer/hour (customizable according to different production capacity requirements)
Breakage rate: ≤0.01%
Uptime: ≥98.5%
Characteristics:
SixNy&Al2O3 film removal for TOPCon, BC, HJT high-efficiency solar cells
Flexible process sequence
Efficient rinsing and drying
High throughput, Low CoO
Intelligent equipment, energy consumption statistics and analysis function