- Robotics - Automation - Industrial IT
- Automation
- Process automation system
- RoboTechnik Intelligent Technology Co., Ltd.
Process automation system RTA-DF-12000
Add to favorites
Compare this product
Characteristics
- Options
- process
Description
Throughput: 12000
Breakage rate: 0.01%@182; 0.02%@210
Uptime: ≥99%
Characteristics:
Optional gantry solution or 6-axis robot solution
Linear motor gantry frame design, high speed, stable, reliable
Optional visual flower carrier missing piece detection, quartz boat debris detection, quartz boat positioning
Segmented overall welded steel frame, stable and reliable structure
Support MES interface and remote debug function
Smart IGV interface
Intelligent equipment, OEE statistics & energy consumption analysis
Compatible wafers from M10, M12 and 220-230mm, full size and half size
Catalogs
No catalogs are available for this product.
See all of RoboTechnik Intelligent Technology Co., Ltd.‘s catalogsOther RoboTechnik Intelligent Technology Co., Ltd. products
Solar
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.