Process automation system RTA-DF-12000

Throughput: 12000 Breakage rate: 0.01%@182; 0.02%@210 Uptime: ≥99% Characteristics: Optional gantry solution or 6-axis robot solution Linear motor gantry frame design, high speed, stable, reliable Optional visual flower carrier missing piece detection, quartz boat debris detection, quartz boat positioning Segmented overall welded steel frame, stable and reliable structure Support MES interface and remote debug function Smart IGV interface Intelligent equipment, OEE statistics & energy consumption analysis Compatible wafers from M10, M12 and 220-230mm, full size and half size