- Robotics - Automation - Industrial IT
- Automation
- Production automation system
- RoboTechnik Intelligent Technology Co., Ltd.
Production automation system ARK20process
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Characteristics
- Options
- process, for production
Description
Throughput: 20000-30000
Breakage rate: 0.01%@182; 0.02%@210
Uptime: ≥99%
Characteristics:
Optional crane boat transfer solution or IGV boat transfer solution
Linear motor gantry frame design, high speed, stable, reliable
Optional visual flower carrier missing piece detection, quartz boat debris detection, quartz boat positioning
Segmented overall welded steel frame, stable and reliable structure
Support MES interface and remote debug function
Smart IGV interface
Intelligent equipment, OEE statistics & energy consumption analysis
Compatible wafers from M10, M12 and 220-230mm, full size and half size
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.