Production automation system RTA-PE-4000-9000
process

production automation system
production automation system
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process, for production

Description

Throughput: 4000-9000 Breakage rate: 0.04%@182; 0.05%@210 Uptime: ≥99% Characteristics: Optional Stäubli or FANUC manipulator insert Segmented overall welded steel frame, stable and reliable structure Optional visual warping detection and graphite boat positioning Support MES interface and remote debug function Smart IGV interface Online AOI and PL detection Intelligent equipment, OEE statistics & energy consumption analysis Compatible wafers from M10, M12 and 220-230mm, full size and half size

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.