Throughput: 4000-9000
Breakage rate: 0.04%@182; 0.05%@210
Uptime: ≥99%
Characteristics:
Optional Stäubli or FANUC manipulator insert
Segmented overall welded steel frame, stable and reliable structure
Optional visual warping detection and graphite boat positioning
Support MES interface and remote debug function
Smart IGV interface
Online AOI and PL detection
Intelligent equipment, OEE statistics & energy consumption analysis
Compatible wafers from M10, M12 and 220-230mm, full size and half size