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  1. Robotics - Automation - Industrial IT
  2. Automation
  3. Production automation system
  4. RoboTechnik Intelligent Technology Co., Ltd.

Production automation system RTA-PECVD-6000-16000
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production automation system
production automation system
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Description

Throughput: 6000-16000 Breakage rate: ≤0.04%@166; 0.04%@182; 0.04%@210 Uptime: ≥99% Characteristics: Optional loading and unloading separated or integrated layout Segmented overall welded steel frame, stable and reliable structure Optional automatic debris removal Support MES interface and remote debug function Smart IGV interface Intelligent equipment, OEE statistics & energy consumption analysis Compatible wafers from M10, M12 and 220-230mm, full size and half size

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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