Throughput: 23500
Breakage rate: 0.01%@182; 0.02%@210
Uptime: ≥99%
Characteristics:
Optional gantry solution or 6-axis robot solution
Linear motor gantry frame design, high speed, stable, reliable
Optional visual flower carrier missing piece detection, quartz boat debris detection, quartz boat positioning
Segmented overall welded steel frame, stable and reliable structure
Support MES interface and remote debug function
Smart IGV interface
Intelligent equipment, OEE statistics & energy consumption analysis
Compatible wafers from M10, M12 and 220-230mm, half size