Low pressure phosphorus diffusion & doping.
• Technical solutions for high sheet resistance.
• Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.
• Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.
• High-speed and stable integral module boat pushing mechanism.
• Intelligent automatic control.
• MES software with independent intellectual property rights.
• Matching S.C smart production management system.