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Diffusion furnace DOA-40 series
automatichorizontal

Diffusion furnace - DOA-40 series - S.C New Energy Technology Corporation - automatic / horizontal
Diffusion furnace - DOA-40 series - S.C New Energy Technology Corporation - automatic / horizontal
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Characteristics

Function
diffusion
Other characteristics
automatic, horizontal

Description

Low pressure phosphorus diffusion & doping. • Technical solutions for high sheet resistance. • Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively. • Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively. • High-speed and stable integral module boat pushing mechanism. • Intelligent automatic control. • MES software with independent intellectual property rights. • Matching S.C smart production management system.
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.