Filter gas purifier PS7-PD1 Series

hydrogenoxygen

SAES Pure Gas Palladium Hydrogen Purifiers produce the purest hydrogen on the planet. The patented Micro-Channel design offer the most significant innovation in hydrogen gas purification in over 20 years. The advanced Hydrogen purifier offers higher flow capacity with lower cost and improved durability for high-volume manufacturing processes. SAES Pure Gas Hydrogen purifiers deliver 9N's (99.9999999%) purity with typical levels. The PS7-PD1 includes one Palladium cell in a compact enclosure for a wide range of flows for point-of-use purification for single process tools or bulk gas supply for many process tools at large LED and semiconductor fabs. A single Palladium cell purifiers the entire inlet Hydrogen flow. The enclosure is suited for installation near the process tools or in a bulk gas room.