Floor-standing gas purifier PS5 Series

filterargon

The PS5 MegaTorr Rare Gas purifiers are heated getter-based purifiers designed specifically to provide ultra-high purity (UHP) Helium or Argon gas for semiconductor applications. The patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Impurities removed will not be released under any circumstances when the purifier is operated within specification. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 (THC or Total Hydrocarbons) and N2 are reduced to parts per billion concentrations. These Purifiers are designed to last multiple years, but the lifetime depends on the inlet impurity concentrations and the average flow rate. Please contact the factory for lifetime calculations. Once the column is consumed it can be replaced with a new column, for a new lifetime. Downstream of the heated getter columns, Hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU).