Compact cylinder linear servo motor.
This 20 mm wide linear motor is an all-in-one product with a built-in linear encoder and linear guide. It has a stroke length of 50 mm and a maximum thrust of 50 N and achieves a peak acceleration of 416 m/s2, which is the highest in the industry (1)
It contributes to shortening equipment cycle times and simplifying system design for semiconductor manufacturing equipment, inspection equipment, and assembly equipment.
(1) Based on our own research as of January 28, 2020, conducted among equally-sized cylindrical linear servo motors on the market.