Automatic materials handling system SYZ-VI-B

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Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading& unloading can guarantee the continuous production or be used only for wafer loading or unloading is also available. · With imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers;·With IPC based running master computer software in HMI, high speed data interaction can be realized by network communication. · With precise detection components to dectect the dynamic position of the quartz boat to rectifying the positioning. · With cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature. · The comb,gripper adopt special processing technology which greatly reduce the marks on wafers. · Cassette can be vertical or horizontal, customer can choose flexibly according to their needs. · MES function, sheet resistance detection and AGV, optional.