Solar deposition machine LD-42 series

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells. • Low pressure and hot wall process characteristics, with better film uniformity and good compactness. • LPCVD process, densely loaded substrates have little effect on the coating rate, with large loading capacity in single tube. • More temperature zones to ensure the uniformity between wafers reliably. • Independently adjustable segmented air inlet to compensate for the airflow depletion effect.