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Diffusion furnace DOA-40 seriesautomatichorizontal
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Characteristics
- Function
- diffusion
- Other characteristics
- automatic, horizontal
Description
Low pressure phosphorus diffusion & doping.
• Technical solutions for high sheet resistance.
• Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.
• Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.
• High-speed and stable integral module boat pushing mechanism.
• Intelligent automatic control.
• MES software with independent intellectual property rights.
• Matching S.C smart production management system.
Other S.C New Energy Technology Corporation products
Horizontal Furnaces Series
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.