Cleanroom System for Microoptic - Wafer Development
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)
•self-supporting, modular construction system
•composite panel-wall fillings
•extensive cleanroom windows
•innovative sealing system
•U15 ULPA high performed-filter-fan-module
•fully integrated, flush mounted cleanroom lighting
•fully integrated air circulation and return air guidance
•fully integrated media supply
•changing rooms for personal or material / cleanroom door
with sensitive switch and mutual door interlocking
control
•fully integrated regulation