Cleanroom System for Production Semiconductor Optical Systems
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)
•self-supporting, modular construction system
•composite panel-wall fillings
•extensive cleanroom windows
•innovative sealing system
•U15 ULPA high performed-filter-fan-module
•fully integrated, flush mounted cleanroom lighting
•fully integrated air circulation and return air guidance
•fully integrated media supply
•changing rooms for personal and cleanroom sliding doors
with sensitive switch and mutual door interlocking
control
•material lock with cleanroom rolling doors
•fully integrated regulation