Glass MEMpax®

Ultra-thin borosilicate glass SCHOTT MEMpax® is a borosilicate glass with a fire-polished surface. It has similar chemical and physical characteristics to the well-known product SCHOTT Borofloat® 33. At the same time, MEMpax® is available in much lower thicknesses and offers a thin wafer that no longer needs to be ground and polished thanks to its excellent surface quality. SCHOTT MEMpax® can be used anywhere that extremely thin borosilicate glasses are needed. The coefficient of linear thermal expansion of MEMpax® corresponds with that of silicon, and this glass is perfectly suited for use in anodic bonding. Due to its low auto fluorescence, excellent surface quality, flatness and homogeneity, the application possibilities for MEMpax® in microelectromechanical systems (MEMS) and biotechnology are numerous. Advantages Microelectromechanical systems (MEMS) • Coefficient of linear thermal expansion corresponds with that of silicon • Suited for anodic bonding • Thin borosilicate glass wafers without polishing • High thermal and chemical resistance Biotechnology • High transmission • Available in various thicknesses • Low autofluorescence • Excellent surface quality Technical Data Dimensions : 2" to 12", round or rectangular Surface roughness Ra : < 0.5 nm Thicknesses* : 0.1 mm to 0.5 mm Standard thicknesses* : 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm Luminous transmittance ΤvD65 (thickness = 0.5 mm) : 92.9% Coefficient of mean linear thermal expansion α (20 °C; 300 °C) (static measurement) : 3.3 · 10–6 K–1 Transformation temperature Tg : 532 °C Dielectric constant εr at 1 MHz : 4.8 Refractive index nD (as drawn) : 1.4714 Density ρ (annealed at 40 °C/h) : 2.22 g/cm3