Ceramic disk ZERODUR®

Product Information Extremely low thermal expansion ZERODUR®, the extremely low thermal expansion glass ceramic from SCHOTT, delivers extremely high precision for many challenging high-tech applications. Some of the applications for ZERODUR® include IC (Interated Circuit) and FPD (Flat Panel Display) lithography, high-precision metrology and astronomy, all demanding applications in which geometrical shape and distance changes must be minimized as much as possible at temperature variations. ZERODUR® is an inorganic, non-porous Lithium Aluminum Silicon oxide glass ceramic characterized by evenly-distributed nano-crystals within a residual glass phase. SCHOTT offers ZERODUR® as small finished components, ultra-light weight mirror substrates, but also as mirror substrates for large segmented and monolithic astronomical telescopes. Advantages ZERODUR®, the extremely low expansion glass ceramic, has various extraordinary properties, including: • Extremely low coefficient of thermal expansion (CTE - Coefficient of thermal Expansion) for a wide range of entire blanl volume temperatures • Excellent CTE homogeneity throughout the total volume • Very low level of inclusions, striae and internal stress • Wide range of precise geometrical shapes • To be polished to extremely smooth surface roughness below 1 nm RMS • Excellent chemical stability • Reliable properties for small components and large mirror substrates