Glass FOTURAN® II

Product Information Photo-Sensitive glass wafer FOTURAN® II is an improved photo-sensitive glass based on the well-known FOTURAN®. It is produced in a continuous melting process with optimal homogeneity. FOTURAN® II is a technical glass that crystallizes after UV exposure and temperature processes. The crystallized areas can be etched away with a high aspect ratio, resulting in extremely fine structures and vias. After a second exposure and tempering process, FOTURAN® II can be transformed into a glass ceramic. If needed, structured FOTURAN® II substrates can be applied in the semiconductor chip and semiconductor packaging processes. The process flow works without photo-resist and can be used with standard semiconductor equipment. Advantages Advantages • High homogeneity: advanced melting process allows consistent and reproducible photosensitivity • Extremely fine structure sizes with high aspect ratios • Can be structured without the need for photo-resist • Excellent transmission characteristics (visible and non-visible spectrum) • Biotech compatibility: temperature resistant and chemically stable • Environmentally friendly: complies with the regulations of EU-RoHS and EU-REACH • Proven track-record: proven material for more than 30 years and cutting edge publications on processing available Applications • Semiconductor: Interposer • Telecommunications : Optical waveguides / optical interconnects • MEMS sensors: Substrate and functional element • RF Applications: Interposer, substrate and functional element • Microfluidics: Lab-on-a-chip, micro-reactors and print-heads • Microoptics: Micro-optical elements