Electron beam evaporator EFM 6

process

Evaporation area > 50 mm Crucible capacitiy up to 10 cm3 Evaporation from wires, rods or crucibles Integrated cooled shutter Water cooling for minimum pressure rise A FOCUS product The EFM 6 evaporator extends the EFM product range onto a larger scale. With a NW 63 CF (4.5" OD) base flange and a crucible capacity of up to 10 cm3, the EFM 6 holds about ten times as much material as the EFM 3. Already at a short working distance the evaporation area is larger than 50 mm in diameter, which makes the EFM 6 ideally suited for substrates between 2" and 4". Featuring an integrated flux monitor and shutter, the EFM 6 is a unique tool in the medium-sized evaporator range, not only suitable for the growth of sub-monolayers but also for thick bond pads etc. For extended service cycles, the EFM 6 is equipped with a double filament. The required high power to heat the large crucibles is supplied by the EVC 1200.